Effects of surface morphology randomness on optical properties of Si-based photonic nanostructures

We have fabricated Si-based photonic nanostructures with submicron sizes by the maskless wet etching of Ge quantum dot (QD) multilayers and demonstrated that the photonic nanostructures result in the enhanced optical absorption in the near-infrared light owing to light trapping. In this study, the o...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2017-08, Vol.56 (8S2), p.8
Hauptverfasser:	Kurokawa, Yasuyoshi, Aonuma, Osamu, Tayagaki, Takeshi, Takahashi, Isao, Usami, Noritaka
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption Diodes Finite difference method Finite difference time domain method Morphology Multilayers Nanostructure Near infrared radiation Optical properties Photonics Quantum dots Randomness Silicon Surface chemistry Time domain analysis
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