Stator optimization and evaluation method in a surface acoustic wave motor

The interdigital transducer (IDT) of a surface acoustic wave (SAW) motor comprises two unidirectional IDTs (U-IDTs), including a driving IDT (D-IDT) and a reflector IDT (R-IDT). In order to improve the conductance of the U-IDT, the distance between the D-IDT and the R-IDT will be adjusted. The novel U-IDT will be investigated by simulation and some measurements. The novel stator will be fabricated by the basic semiconductor planar process. On the other hand, a stator evaluation method for the SAW motor will be reported. Lastly, through the calculation of the wave power, the measured vibration amplitude and stator recycle efficiency will be unified.