Characterization of Fogging and Develop-Loading Effects in Electron-Beam Direct-Writing Technology

Characterization of Fogging and Develop-Loading Effects in Electron-Beam Direct-Writing Technology

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Veröffentlicht in:Japanese Journal of Applied Physics 2012-06, Vol.51 (6S), p.6
Hauptverfasser: Kon, Jun-ichi, Kojima, Yoshinori, Takahashi, Yasushi, Maruyama, Takashi, Sugatani, Shinji
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Sprache:eng ; jpn
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container_issue 6S
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container_title Japanese Journal of Applied Physics
container_volume 51
creator Kon, Jun-ichi
Kojima, Yoshinori
Takahashi, Yasushi
Maruyama, Takashi
Sugatani, Shinji
description
doi_str_mv 10.7567/JJAP.51.06FC04
format Article
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ispartof Japanese Journal of Applied Physics, 2012-06, Vol.51 (6S), p.6
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title Characterization of Fogging and Develop-Loading Effects in Electron-Beam Direct-Writing Technology
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