An Approach to a High-Throughput E-Beam Writer with a Single-Gun Multiple-Path System

This paper proposes a new electron optical system with a single-gun and multiple-paths for a high-throughput e-beam writer. By employing a high-performance gun and key components made on a semiconductor fabrication process the proposed system reduces both the Coulomb interaction and circuit overhead...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Japanese Journal of Applied Physics 1995-12, Vol.34 (12S), p.6689
Hauptverfasser:	Shimazu, Nobuo, Saito, Kenichi, Minpei Fujinami, Minpei Fujinami
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!