Application of Designed-Space Forming Technology

A completely new designed-space forming technology using ceramic green sheet technology and photolithographic technology has been developed for ceramics. With this technology, it is possible to make any fine space accurately and at will in ceramics. A monolithic ceramic ink jet head and a piezoelect...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1987-01, Vol.26 (S2), p.53
Hauptverfasser:	Utsumi, Kazuaki, Ikeda, Teruyuki, Suga, Michihisa, Takamizawa, Hideo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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