Depth Directional Study by Electron-Acoustic Microscopy
Observation depth of electron-acoustic microscopy (EAM) was studied by in situ observation of a same area of a Darlington npn Si Tr-chip under several accelerating voltages (HV) of a scanning electron beam which was used as an experimental parameter. Comparison of several SEM mode images and electro...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 1987-01, Vol.26 (S1), p.239 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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