Microstructural analysis of an epitaxial AlN thick film/trench-patterned template by three-dimensional reciprocal lattice space mapping technique

Three-dimensional (3D) lattice plane microstructures were investigated at local regions in an epitaxial AlN thick film grown on a trench-patterned AlN/sapphire template. A 3D reciprocal lattice space mapping technique combined with cross-sectional X-ray microdiffraction using an appropriate Bragg re...

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Veröffentlicht in:	Applied physics express 2016-11, Vol.9 (11), p.111001
Hauptverfasser:	Kamada, Shohei, Takeuchi, Shotaro, Khan, Dinh Thanh, Miyake, Hideto, Hiramatsu, Kazumasa, Imai, Yasuhiko, Kimura, Shigeru, Sakai, Akira
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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