Microstructural analysis of an epitaxial AlN thick film/trench-patterned template by three-dimensional reciprocal lattice space mapping technique

Microstructural analysis of an epitaxial AlN thick film/trench-patterned template by three-dimensional reciprocal lattice space mapping technique

Three-dimensional (3D) lattice plane microstructures were investigated at local regions in an epitaxial AlN thick film grown on a trench-patterned AlN/sapphire template. A 3D reciprocal lattice space mapping technique combined with cross-sectional X-ray microdiffraction using an appropriate Bragg re...

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Veröffentlicht in:Applied physics express 2016-11, Vol.9 (11), p.111001
Hauptverfasser: Kamada, Shohei, Takeuchi, Shotaro, Khan, Dinh Thanh, Miyake, Hideto, Hiramatsu, Kazumasa, Imai, Yasuhiko, Kimura, Shigeru, Sakai, Akira
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container_issue 11
container_start_page 111001
container_title Applied physics express
container_volume 9
creator Kamada, Shohei
Takeuchi, Shotaro
Khan, Dinh Thanh
Miyake, Hideto
Hiramatsu, Kazumasa
Imai, Yasuhiko
Kimura, Shigeru
Sakai, Akira
description Three-dimensional (3D) lattice plane microstructures were investigated at local regions in an epitaxial AlN thick film grown on a trench-patterned AlN/sapphire template. A 3D reciprocal lattice space mapping technique combined with cross-sectional X-ray microdiffraction using an appropriate Bragg reflection quantitatively revealed the inhomogeneity of the lattice structures in the AlN film without loss of spatial resolution. The results showed a strong correlation of the lattice plane tilt/twist and variations with respect to the void configuration, the patterning structure of the template, and the dislocation morphologies confirmed by transmission electron microscopy.
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title Microstructural analysis of an epitaxial AlN thick film/trench-patterned template by three-dimensional reciprocal lattice space mapping technique
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