Synthesis of Diamond Thin Film on Si Substrate by Microwave-Plasma CVD

Diamond film was deposited by microwave plasma CVD from a CH4-H2 reactant gas at a subatmospheric pressure of 3.0kPa, in order to investigate the effects of such parameters as gas composition and flow rate on the growth rate and properties of the film. The silicon substrate, when polished with 5μm d...

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Veröffentlicht in:Journal of the Metal Finishing Society of Japan 1988/08/01, Vol.39(8), pp.434-439
Hauptverfasser: CHEN, Chia-Fu, HUANG, Yen C, HOSOMI, Satoru
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container_end_page 439
container_issue 8
container_start_page 434
container_title Journal of the Metal Finishing Society of Japan
container_volume 39
creator CHEN, Chia-Fu
HUANG, Yen C
HOSOMI, Satoru
description Diamond film was deposited by microwave plasma CVD from a CH4-H2 reactant gas at a subatmospheric pressure of 3.0kPa, in order to investigate the effects of such parameters as gas composition and flow rate on the growth rate and properties of the film. The silicon substrate, when polished with 5μm diamond paste, was observed to have a favorable affect on film deposition. Growth rate reached a maximum of approx. 1μm/hr at 3% CH4, at3% CH4, the rate decreased with an increasing flow rate. The films exhibited an agglomerate structure of idiomorphic grains when deposited at low CH4 levels, and consisted of agglomerates of increasingly round fine crystals when deposited at higher levels. The deposition rate was essentially constant over the whole reaction time. The highest film deposition rate was obtained at a microwave power of 220W, whereby the substrate was, estimated to reach a temperature of 1173K.
doi_str_mv 10.4139/sfj1950.39.434
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source J-STAGE (Japan Science & Technology Information Aggregator, Electronic) Freely Available Titles - Japanese
subjects Deposition Rate
Diamond Thin Film
Gas Flow Rate
Methane Concentration
Microwave Plasma CVD
Scratch Effect
title Synthesis of Diamond Thin Film on Si Substrate by Microwave-Plasma CVD
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