Characterization of SiC Nanostructures in Crystalline and Porous Silicons formed by Ion Beam Synthesis

Characterization of SiC Nanostructures in Crystalline and Porous Silicons formed by Ion Beam Synthesis

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Veröffentlicht in:Journal of the Korean Physical Society 2010-06, Vol.56 (6(1)), p.2063-2067
Hauptverfasser: Woo, Hyung-Joo, Kim, Gi-Dong, Choi, Han-Woo, Kim, Joon-Kon
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Sprache:eng ; jpn
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container_issue 6(1)
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container_title Journal of the Korean Physical Society
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creator Woo, Hyung-Joo
Kim, Gi-Dong
Choi, Han-Woo
Kim, Joon-Kon
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title Characterization of SiC Nanostructures in Crystalline and Porous Silicons formed by Ion Beam Synthesis
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