Influence of in-situ Nitrogen Dopant Amounts on the Characteristics of Polycrystalline 3C-SiC Microresonators

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Veröffentlicht in:	Journal of the Korean Physical Society 2010-06, Vol.56 (6), p.1818-1821
Hauptverfasser:	Chung, Gwiy-Sang, Han, Ki-Bong
Format:	Artikel
Sprache:	eng
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source	Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals
title	Influence of in-situ Nitrogen Dopant Amounts on the Characteristics of Polycrystalline 3C-SiC Microresonators
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