Structural Analysis of a Mo/Si EUV Reflector by Optical Modeling

Structural Analysis of a Mo/Si EUV Reflector by Optical Modeling

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Veröffentlicht in:Journal of the Korean Physical Society 2003-11, Vol.43 (5), p.822-825
Hauptverfasser: Kang, In-Yong, Chung, Chan-Yeup, Chung, Yong-Chae, Kim, Taegeun, Lee, Seung Yoon, Ahn, Jinho
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container_end_page 825
container_issue 5
container_start_page 822
container_title Journal of the Korean Physical Society
container_volume 43
creator Kang, In-Yong
Chung, Chan-Yeup
Chung, Yong-Chae
Kim, Taegeun
Lee, Seung Yoon
Ahn, Jinho
description
doi_str_mv 10.3938/jkps.43.822
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fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_3938_jkps_43_822</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_3938_jkps_43_822</sourcerecordid><originalsourceid>FETCH-LOGICAL-c189t-f33e877116a167c94c8376f4b1fb139735b431fc895635964f0b680c96dced713</originalsourceid><addsrcrecordid>eNotz7tuwjAYBWAPrQSlTH0B71WCze_4shUhepFASKV0tRzHrkxTEtlmyNs3qJ3OcnSOPoQeKClBgVycvvtUMijlcnmDpgQEK5iUbILuUjoRwgAEn6KnQ44Xmy_RtHh1Nu2QQsKdxwbvusUh4M3xE7873zqbu4jrAe_7HOxY3nWNa8P56x7detMmN__PGTo-bz7Wr8V2__K2Xm0LS6XKhQdwUghKuaFcWMWsHP89q6mvKSgBVc2AeitVxaFSnHlSc0ms4o11jaAwQ49_uzZ2KUXndR_Dj4mDpkRfwfoK1gz0CIZfBRVKFQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Structural Analysis of a Mo/Si EUV Reflector by Optical Modeling</title><source>Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals</source><creator>Kang, In-Yong ; Chung, Chan-Yeup ; Chung, Yong-Chae ; Kim, Taegeun ; Lee, Seung Yoon ; Ahn, Jinho</creator><creatorcontrib>Kang, In-Yong ; Chung, Chan-Yeup ; Chung, Yong-Chae ; Kim, Taegeun ; Lee, Seung Yoon ; Ahn, Jinho</creatorcontrib><identifier>ISSN: 0374-4884</identifier><identifier>DOI: 10.3938/jkps.43.822</identifier><language>eng</language><ispartof>Journal of the Korean Physical Society, 2003-11, Vol.43 (5), p.822-825</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,778,782,27911,27912</link.rule.ids></links><search><creatorcontrib>Kang, In-Yong</creatorcontrib><creatorcontrib>Chung, Chan-Yeup</creatorcontrib><creatorcontrib>Chung, Yong-Chae</creatorcontrib><creatorcontrib>Kim, Taegeun</creatorcontrib><creatorcontrib>Lee, Seung Yoon</creatorcontrib><creatorcontrib>Ahn, Jinho</creatorcontrib><title>Structural Analysis of a Mo/Si EUV Reflector by Optical Modeling</title><title>Journal of the Korean Physical Society</title><issn>0374-4884</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2003</creationdate><recordtype>article</recordtype><recordid>eNotz7tuwjAYBWAPrQSlTH0B71WCze_4shUhepFASKV0tRzHrkxTEtlmyNs3qJ3OcnSOPoQeKClBgVycvvtUMijlcnmDpgQEK5iUbILuUjoRwgAEn6KnQ44Xmy_RtHh1Nu2QQsKdxwbvusUh4M3xE7873zqbu4jrAe_7HOxY3nWNa8P56x7detMmN__PGTo-bz7Wr8V2__K2Xm0LS6XKhQdwUghKuaFcWMWsHP89q6mvKSgBVc2AeitVxaFSnHlSc0ms4o11jaAwQ49_uzZ2KUXndR_Dj4mDpkRfwfoK1gz0CIZfBRVKFQ</recordid><startdate>20031115</startdate><enddate>20031115</enddate><creator>Kang, In-Yong</creator><creator>Chung, Chan-Yeup</creator><creator>Chung, Yong-Chae</creator><creator>Kim, Taegeun</creator><creator>Lee, Seung Yoon</creator><creator>Ahn, Jinho</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20031115</creationdate><title>Structural Analysis of a Mo/Si EUV Reflector by Optical Modeling</title><author>Kang, In-Yong ; Chung, Chan-Yeup ; Chung, Yong-Chae ; Kim, Taegeun ; Lee, Seung Yoon ; Ahn, Jinho</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c189t-f33e877116a167c94c8376f4b1fb139735b431fc895635964f0b680c96dced713</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2003</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kang, In-Yong</creatorcontrib><creatorcontrib>Chung, Chan-Yeup</creatorcontrib><creatorcontrib>Chung, Yong-Chae</creatorcontrib><creatorcontrib>Kim, Taegeun</creatorcontrib><creatorcontrib>Lee, Seung Yoon</creatorcontrib><creatorcontrib>Ahn, Jinho</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of the Korean Physical Society</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kang, In-Yong</au><au>Chung, Chan-Yeup</au><au>Chung, Yong-Chae</au><au>Kim, Taegeun</au><au>Lee, Seung Yoon</au><au>Ahn, Jinho</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Structural Analysis of a Mo/Si EUV Reflector by Optical Modeling</atitle><jtitle>Journal of the Korean Physical Society</jtitle><date>2003-11-15</date><risdate>2003</risdate><volume>43</volume><issue>5</issue><spage>822</spage><epage>825</epage><pages>822-825</pages><issn>0374-4884</issn><doi>10.3938/jkps.43.822</doi><tpages>4</tpages></addata></record>
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title Structural Analysis of a Mo/Si EUV Reflector by Optical Modeling
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T16%3A01%3A18IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Structural%20Analysis%20of%20a%20Mo/Si%20EUV%20Reflector%20by%20Optical%20Modeling&rft.jtitle=Journal%20of%20the%20Korean%20Physical%20Society&rft.au=Kang,%20In-Yong&rft.date=2003-11-15&rft.volume=43&rft.issue=5&rft.spage=822&rft.epage=825&rft.pages=822-825&rft.issn=0374-4884&rft_id=info:doi/10.3938/jkps.43.822&rft_dat=%3Ccrossref%3E10_3938_jkps_43_822%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true