Fabrication and Diffraction Efficiency of a Large-format, Replicated X-Ray Reflection Grating

We present the methodology used to fabricate an X-ray reflection grating and describe a technique for grating replication. Further, we present the experimental procedure and results of a study to measure the diffraction efficiency of a replicated X-ray reflection grating in an extreme off-plane geometry. The blazed grating demonstrates a total diffraction efficiency of ∼60% from 0.34 to 1.2 keV at a grazing angle of ∼1 5, with single-order efficiency ranging from ∼35% to 65% for energies within the blaze envelope. The diffraction efficiency of the grating measured relative to the reflectivity of the metal coating averages ∼90% above 0.34 keV. Data collected as a function of beam position on the grating indicate a relative variation in total efficiency of