Evaluation of electrical resistivity, residual stress and surface roughness of sputtering indium tin oxide films with different thicknesses

This paper investigates the influence of film thickness on the electrical and mechanical properties of transparent indium tin oxide (ITO) thin films. Two groups of ITO thin films deposited on unheated substrates were prepared by the radio-frequency magnetron sputtering technique. The biaxial residua...

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Veröffentlicht in:	Optica applicata 2021, Vol.51 (4)
Hauptverfasser:	Chuen-Lin Tien, Tsai-Wei Lin, Shu-Hui Su
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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