Simulation of channeled implantation of magnesium ions in gallium nitride

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Veröffentlicht in:	Applied physics express 2021-11, Vol.14 (11), p.116502
Hauptverfasser:	Nishimura, Tomoaki, Kachi, Tetsu
Format:	Artikel
Sprache:	eng
Schlagworte:	channeling GaN implantation
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source	IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects	channeling GaN implantation
title	Simulation of channeled implantation of magnesium ions in gallium nitride
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