Experimental validation of a wave-height sensor based on a MEMS piezoresistive cantilever and a waterproof film

Experimental validation of a wave-height sensor based on a MEMS piezoresistive cantilever and a waterproof film

This paper presents a barometric pressure-sensing wave-height sensor that employs a microelectromechanical system piezoresistive cantilever, an air chamber, and a micromesh waterproof film. The developed sensor has a height resolution of less than 5 mm in the 0.01–10 Hz frequency band and a high tim...

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Veröffentlicht in:Japanese Journal of Applied Physics 2024-12, Vol.63 (12), p.128003
Hauptverfasser: Shimada, Kyota, Kishimoto, Takuto, Takahashi, Hidetoshi
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Sprache:eng
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piezoresistive cantilever
pressure sensor
wave height sensor
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creator Shimada, Kyota
Kishimoto, Takuto
Takahashi, Hidetoshi
description This paper presents a barometric pressure-sensing wave-height sensor that employs a microelectromechanical system piezoresistive cantilever, an air chamber, and a micromesh waterproof film. The developed sensor has a height resolution of less than 5 mm in the 0.01–10 Hz frequency band and a high time resolution with 100 Hz sampling rate. We conducted wave height measurements at sea using the developed sensor and compared its performance with that of a commercial global positioning system buoy-type wave-height sensor.
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subjects piezoresistive cantilever
pressure sensor
wave height sensor
title Experimental validation of a wave-height sensor based on a MEMS piezoresistive cantilever and a waterproof film
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