Analysis of propagation and resonance properties of longitudinal leaky surface acoustic wave on LiNbO 3 /SiC bonded structure

The propagation and resonance properties of longitudinal leaky surface acoustic waves (LLSAW) on a bonded structure comprising an X-cut LiNbO 3 (LN) thin plate and a 4H-SiC support substrate were theoretically investigated. Strong LLSAW responses with high Q factors were obtained at the LN thin-plat...

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Veröffentlicht in:Japanese Journal of Applied Physics 2024-05, Vol.63 (5), p.5
Hauptverfasser: Takei, Ryo, Suzuki, Masashi, Kakio, Shoji, Yamamoto, Yasushi
Format: Artikel
Sprache:eng
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