Heteroepitaxial growth of InSb thin film on SrTiO 3 (001) by pulsed laser deposition for magnetic Hall sensor application

Heteroepitaxial growth of InSb thin film on SrTiO 3 (001) by pulsed laser deposition for magnetic Hall sensor application

Ⅲ–Ⅴ semiconductor compound InSb with a zinc blende structure and extremely high electron mobility was grown as a thin film on SrTiO 3 (STO)(001) substrate by pulsed laser deposition. The growth of (111) oriented InSb was observed despite a large lattice mismatch of 1.6% ([1−10] InSb ∣∣ [010] STO ) a...

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Veröffentlicht in:Japanese Journal of Applied Physics 2022-08, Vol.61 (8), p.80902
Hauptverfasser: Lee, Koomok, Shigematsu, Kei, Azuma, Masaki
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Shigematsu, Kei
Azuma, Masaki
description Ⅲ–Ⅴ semiconductor compound InSb with a zinc blende structure and extremely high electron mobility was grown as a thin film on SrTiO 3 (STO)(001) substrate by pulsed laser deposition. The growth of (111) oriented InSb was observed despite a large lattice mismatch of 1.6% ([1−10] InSb ∣∣ [010] STO ) and 17.8% ([11−2] InSb ∣∣ [100] STO ). Electron mobility of 94 cm 2 V −1 s −1 at room temperature was confirmed by Hall effect measurement and the magnetic field reversal down to 1 Oe was detected. Growth of InSb/STO (001) thin film could be a promising approach for the detection of magnetic signals from various perovskite type functional oxide materials and will find applications in future devices.
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title Heteroepitaxial growth of InSb thin film on SrTiO 3 (001) by pulsed laser deposition for magnetic Hall sensor application
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