Tuning properties of SnO 2 /Au/SnO 2 multilayer with variable Au thicknesses as transparent conductive oxides
Multilayer tin oxide/gold/tin oxide (SnO 2 /Au/SnO 2 ) was deposited by atomic layer deposition and an e-beam evaporator. The structural, electrical, and optical properties of the SnO 2 /Au/SnO 2 multilayer were investigated. Au formed islands at a thickness less than 3 nm. As the Au interlayer thic...
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Veröffentlicht in: | Japanese Journal of Applied Physics 2020-10, Vol.59 (10), p.105502 |
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Hauptverfasser: | , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Multilayer tin oxide/gold/tin oxide (SnO
2
/Au/SnO
2
) was deposited by atomic layer deposition and an e-beam evaporator. The structural, electrical, and optical properties of the SnO
2
/Au/SnO
2
multilayer were investigated. Au formed islands at a thickness less than 3 nm. As the Au interlayer thickness increased, the Au islands merged, resulting in a continuous film 12 nm thick. As the Au interlayer thickness increased from 0 to 12 nm, the carrier concentration and Hall mobility increased to 2.41 × 10
22
cm
−3
and 11.96 cm
2
V
−1
s
−1
, respectively. As a result, the resistivity decreased at 10
−5
Ω cm with an increasing Au interlayer thickness compared to a SnO
2
single layer. In addition, optical transmittance at 550 nm increased by more than 80% at 6 and 9 nm than at Au thicknesses of 3 and 12 nm. SnO
2
/Au/SnO
2
multilayers are promising candidates as an indium-free transparent conducting oxide for use in high performance optoelectronic devices. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.35848/1347-4065/abb4a8 |