Electrical Utilizations of Air Gap Region Formed on Superhydrophobic Silicone Rubber in NaCl Aqueous Solution
A uniform air gap was successfully formed on a superhydrophobic silicone rubber in water or NaCl aqueous solution. The main chain of Si–O bonds of a silicone rubber was photodissociated by a 193 nm ArF excimer laser to lower the molecular weight only in the laser-irradiated microareas; due to the vo...
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| Veröffentlicht in: | Micro 2022-08, Vol.2 (3), p.488-494 |
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| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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