Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas

By reactive magnetron sputtering from a ceramic SnO2:Ta target onto unheated substrates, X-ray amorphous SnO:Ta films were prepared in gas mixtures of Ar/O2(N2O, H2O). The process windows, where the films exhibit the lowest resistivity values, were investigated as a function of the partial pressure...

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Veröffentlicht in:	Coatings (Basel) 2020-03, Vol.10 (3), p.204
Hauptverfasser:	Mientus, Rainald, Weise, Michael, Seeger, Stefan, Heller, Rene, Ellmer, Klaus
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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