Development of an Oil-Free Vacuum Pump using a Unique Bellows
A new oil-free vacuum pump has been developing to substitute for the conventional oil-sealed rotary vacuum pumps. The pump is a four-stage positive displacement pump whose pumping unit consists of a special bellows, an inlet valve and an outlet valve. The shape of the bellows is based on a unique po...
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| Veröffentlicht in: | SHINKU 2003/03/20, Vol.46(3), pp.185-188 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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