Synthesis of Diamond Like Carbon Thin Films by Electron Cyclotron Resonance Sputtering Method

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Veröffentlicht in:	SHINKU 1995/03/20, Vol.38(3), pp.354-357
Hauptverfasser:	NAKAMURA, Tomoki, KAMIJO, Eiji
Format:	Artikel
Sprache:	eng
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title	Synthesis of Diamond Like Carbon Thin Films by Electron Cyclotron Resonance Sputtering Method
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