Automated control system of a molecular-beam epitaxy setup

Automated control system of a molecular-beam epitaxy setup

An automated control system for epitaxial facilities was developed based on the Advantech Co. software and hardware.

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Bibliographische Detailangaben
Veröffentlicht in:Bulletin of the Lebedev Physics Institute 2010-05, Vol.37 (5), p.131-135
Hauptverfasser: Kazakov, I. P., Tsekhosh, V. I., Igonin, M. E., Fofanova, L. A., Shemyakin, S. N.
Format: Artikel
Sprache:eng
Schlagworte:
Physics
Physics and Astronomy
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Beschreibung
Zusammenfassung:An automated control system for epitaxial facilities was developed based on the Advantech Co. software and hardware.
ISSN:1068-3356
1934-838X
DOI:10.3103/S1068335610050027