Advanced process and electron device technology
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| Veröffentlicht in: | Tsinghua science and technology 2022-06, Vol.27 (3), p.534-558 |
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| Sprache: | eng |
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| container_issue | 3 |
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| container_title | Tsinghua science and technology |
| container_volume | 27 |
| creator | Zhang, Dan Su, Xiaojing Chang, Hao Xu, Hao Wang, Xiaolei He, Xiaobin Li, Junjie Zhao, Fei Yao, Qide Luo, Yanna Ma, Xueli Yang, Hong Li, Yongliang Wu, Zhenhua Su, Yajuan Yang, Tao Wei, Yayi Du, Anyan Zhu, Huilong Li, Junfeng Yin, Huaxiang Luo, Jun Ye, Tianchun Wang, Wenwu |
| description | |
| doi_str_mv | 10.26599/TST.2021.9010049 |
| format | Article |
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| ispartof | Tsinghua science and technology, 2022-06, Vol.27 (3), p.534-558 |
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| language | eng |
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| source | EZB-FREE-00999 freely available EZB journals |
| title | Advanced process and electron device technology |
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