Semiconductor Crystal Growth by Modified Vertical Gradient Freezing with Electromagnetic Stirring

This paper presents a numerical model for the unsteady transport of a dopant during the VGF process by submerged heater growth with a steady axial magnetic field and a steady radial electric current. Electromagnetic (EM) stirring can be induced in the gallium-antimonide melt just above the crystal g...

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Veröffentlicht in:Journal of thermophysics and heat transfer 2005-01, Vol.19 (1), p.95-100
Hauptverfasser: Wang, Xianghong, Ma, Nancy, Bliss, David F, Iseler, Gerald W
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Sprache:eng
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