Speculation of Mechanical Properties of Ni-W Micro-gears Fabricated by LIGA Process

Speculation of Mechanical Properties of Ni-W Micro-gears Fabricated by LIGA Process

Microgears made of Ni-W alloy that are expected to have high durability, were successfully fabricated by using the LIGA process with synchrotron radiation. In this study, Ni-W electrodeposited alloy microgears were mechanically evaluated. The LIGA process based on the synchrotron radiation facility,...

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Veröffentlicht in:Journal of Photopolymer Science and Technology 2023/06/15, Vol.36(2), pp.123-126
Hauptverfasser: Yamamoto, Kanta, Tamada, Kohzo, Okamoto, Kana, Amano, Sho, Yamaguchi, Akinobu, Utsumi, Yuichi, Yamasaki, Tohru
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Sprache:eng
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LIGA process
Microgear
Ni-W electrodeposited alloys
Synchrotron Radiation
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container_end_page 126
container_issue 2
container_start_page 123
container_title Journal of Photopolymer Science and Technology
container_volume 36
creator Yamamoto, Kanta
Tamada, Kohzo
Okamoto, Kana
Amano, Sho
Yamaguchi, Akinobu
Utsumi, Yuichi
Yamasaki, Tohru
description Microgears made of Ni-W alloy that are expected to have high durability, were successfully fabricated by using the LIGA process with synchrotron radiation. In this study, Ni-W electrodeposited alloy microgears were mechanically evaluated. The LIGA process based on the synchrotron radiation facility, New SUBARU at the University of Hyogo was performed at the Beamline BL11 (electron energy: 1.0 GeV). A dimensional evaluation of the fabricated microgears showed that they could be fabricated with a high accuracy of a few percent from the design value. Tensile tests and Vickers hardness tests presented that the Ni-W electrodeposited alloy has excellent material properties in terms of both strength and ductility. As a result, micro gears with high precision, high strength, and high ductility can be fabricated using this process.
doi_str_mv 10.2494/photopolymer.36.123
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subjects LIGA process
Microgear
Ni-W electrodeposited alloys
Synchrotron Radiation
title Speculation of Mechanical Properties of Ni-W Micro-gears Fabricated by LIGA Process
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