Fabrication of Moth-eye Antireflective Nanostructures via Oxygen Ion-beam Etching on a UV-curable Polymer

We report a low-cost, high-throughput process for fabricating a moth-eye-like anti-reflector on a curved surface. First, a curved surface was made from a UV-curable resin via UV imprinting. Then, the moth-eye-like structures were formed directly on the polymer surface via oxygen ion-beam etching. Th...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2021/06/11, Vol.34(2), pp.133-138
Hauptverfasser:	Okabe, Takao, Yatagawa, Katsuyuki, Fujiwara, Kazuki, Taniguchi, Jun
Format:	Artikel
Sprache:	eng
Schlagworte:	Anti-reflection Ion-beam etching Moth-eye Nanostructures UV nanoimprinting
Online-Zugang:	Volltext
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