Precision Removal of ITO Film by LD-pumped SHG YAG Laser

ITO film, which is a kind of transparent conductive film, has been used for LCD, PDP and so on. This film is mostly removed by wet etching method. However, this method needs many chemicals, processes and large-size equipments. On the other hand, laser beam processing can drastically reduces the numb...

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Veröffentlicht in:	Journal of the Japan Society for Precision Engineering 2002/12/05, Vol.68(12), pp.1564-1569
Hauptverfasser:	OKAMOTO, Yasuhiro, UNO, Yoshiyuki, HIRAO, Yasuyuki
Format:	Artikel
Sprache:	jpn
Schlagworte:	backside irradiation ITO film LD-pumped SHG YAG laser transparent electrode
Online-Zugang:	Volltext
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