Microprotuberance Processing of Silicon by Diamond Tip Scanning

In this study, the properties and mechanism of Si microprotuberance processing are evaluated with diamond tip scanning using atomic force microscopy (AFM) in the atmosphere. Microprotuberances on the surface approximately 1-nm-high were formed by mechanochemical action. To control the height of the...

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Veröffentlicht in:	Journal of the Japan Society for Precision Engineering 1999/12/05, Vol.65(12), pp.1788-1792
Hauptverfasser:	MIYAKE, Shojiro, KIM, Jongduk
Format:	Artikel
Sprache:	jpn
Schlagworte:	atomic force microscopy diamond tip mechanochemical processing microprotuberance processing silicon
Online-Zugang:	Volltext
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