Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization

The fabrication of sub-100 nm feature sizes in large-scale three-dimensional (3D) geometries by two-photon polymerization requires a precise control of the polymeric reactions as well as of the intensity distribution of the ultrashort laser pulses. The authors, therefore, investigate the complex int...

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Veröffentlicht in:	Journal of laser applications 2012-09, Vol.24 (4)
Hauptverfasser:	Burmeister, Frank, Steenhusen, Sönke, Houbertz, Ruth, Zeitner, Uwe D., Nolte, Stefan, Tünnermann, Andreas
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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