Design and performance of multilevel phase fan-out diffractive optical elements for laser materials processing

A multilevel phase fan-out diffractive optical element (DOE) has been developed and introduced into various kinds of laser materials processing such as drilling, cutting, welding, and soldering. The larger the number of arrayed spots the DOE generates on the surface of the workpiece, the more sensit...

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Veröffentlicht in:Journal of laser applications 2003-11, Vol.15 (4), p.246-254
Hauptverfasser: Fuse, Keiji, Hirai, Takayuki, Ushiro, Toshihiko, Okada, Takeshi, Kurisu, Kenichi, Ebata, Keiji
Format: Artikel
Sprache:eng
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