Mechanism and rapid process of YAG laser process on SnO2 system thin films

Nano-second pulsed Nd:YAG laser (1064nm) process on SnO2 system thin films on glass as transparent electrode for Flat Panel Displays(FPD) was investigated in this paper. Mechanism of laser ablation, which is an interaction between material and laser, was studied to approach low energy process for ma...

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Veröffentlicht in:	QUARTERLY JOURNAL OF THE JAPAN WELDING SOCIETY 2009, Vol.27(1), pp.48-54
Hauptverfasser:	USUI, Reo, SATOH, Ryohei, MIHARA, Yu, IWATA, Yoshiharu, MORINAGA, Eiji, ISONO, Takamitsu
Format:	Artikel
Sprache:	jpn
Schlagworte:	ablation mechanism carrier concentration deep level excitation SnO2 transparent electrode YAG laser
Online-Zugang:	Volltext
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