Properties of Mn-Cu Oxide Thin-Film Microthermistors Prepared Using a YAG Laser

Thin-film microthermistors were prepared from Mn-Cu layered thin-films using a YAG laser. A Mn thin-film and a Cu thin-film were continuously deposited on quartz substrates by the vacuum deposition method, then the YAG laser beam was irradiated to the layered thin-films in air and scanned at various...

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Veröffentlicht in:	Journal of the Ceramic Society of Japan 1997/06/01, Vol.105(1222), pp.522-525
Hauptverfasser:	SATO, Yuichi, KIRITA, Hidekazu, TAGUCHI, Haruo, OGASAWARA, Tadashi, SATO, Susumu
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Oxidation Thermistor Thin film YAG laser
Online-Zugang:	Volltext
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