Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment

This paper details the development of an inertia-driven X-Y microstage and simple gripper for a pick-up lens in Blu-ray disc alignment incorporating inertia-driven microsliders on V-shaped grooves and a micropart handler. The microslider is driven by impact generated by a mass connected with a piezo...

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Veröffentlicht in:Journal of robotics and mechatronics 2009-10, Vol.21 (5), p.635-641
Hauptverfasser: Irie, Yuuka, Aoyama, Hisayuki, Kubo, Junichi, Fujioka, Takahiro, Usuda, Takashi
Format: Artikel
Sprache:eng
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