Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique

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Veröffentlicht in:	Research Journal of Applied Sciences, Engineering and Technology Engineering and Technology, 2014-04, Vol.7 (13), p.2701-2704
Hauptverfasser:	Idzdihar Idris, M., Amin, Nowshad, Arith, Faiz, Chachuli, S.A.M.
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Sprache:	eng
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title	Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique
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