Scaling-up PECVD system for large-sized substrate processing

Scaling-up PECVD system for large-sized substrate processing

— With the prevailing trend of large‐panel TFT monitors and, most recently, LCD TVs, large‐sized‐substrate processing is becoming the mainstream of TFT‐LCD production. To enable this trend of ever‐increasing large‐area processing, a multiple generations of PECVD systems for volume production has bee...

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Veröffentlicht in:Journal of the Society for Information Display 2005-02, Vol.13 (2), p.99-103
Hauptverfasser: Sun, Sheng, Takehara, Takako, Kang, In Doo
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Sprache:eng
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COO
cost-of-ownership reduction
large-area processing
PECVD
process scale-up
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container_issue 2
container_start_page 99
container_title Journal of the Society for Information Display
container_volume 13
creator Sun, Sheng
Takehara, Takako
Kang, In Doo
description — With the prevailing trend of large‐panel TFT monitors and, most recently, LCD TVs, large‐sized‐substrate processing is becoming the mainstream of TFT‐LCD production. To enable this trend of ever‐increasing large‐area processing, a multiple generations of PECVD systems for volume production has been successfully developed. This paper discusses the scaling‐up challenges from the equipment manufacturer's perspective, with the focus on process scalability, system design optimization, productivity enhancement, and cost‐of‐ownership reduction.
doi_str_mv 10.1889/1.2012590
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subjects COO
cost-of-ownership reduction
large-area processing
PECVD
process scale-up
title Scaling-up PECVD system for large-sized substrate processing
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