The Metrological Basis and Operation of Nanopositioning and Nanomeasuring Machine NMM-1Metrologische Grundlagen und Wirkungsweise der Nanopositionier- und Messmaschine NMM-1

After an explanation of the set-up of a nanomeasuring machine NMM-1, its high performance is described with a metrological analysis. This analysis shows some of today´s limits of nanopositioning and nanomeasuring engineering. Single, double and triple beam plane mirror interferometers are applied in...

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Veröffentlicht in:Technisches Messen 2009-05, Vol.76 (5), p.227-234
Hauptverfasser: Jäger, Gerd, Manske, Eberhard, Hausotte, Tino, Büchner, H.-J.
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Manske, Eberhard
Hausotte, Tino
Büchner, H.-J.
description After an explanation of the set-up of a nanomeasuring machine NMM-1, its high performance is described with a metrological analysis. This analysis shows some of today´s limits of nanopositioning and nanomeasuring engineering. Single, double and triple beam plane mirror interferometers are applied in the nanomeasuring machine in order to measure and control the six degrees of freedom of the 3D nanopositioning stage. The various applications of the nanomeasuring machine are based on the installation of optical and tactile nanoprobes above the 3D nanopositioning stage. The set-up, function and measurement results of some zero-point nanoprobes in combination with the nanomeasuring machine are explained.
doi_str_mv 10.1524/teme.2009.0960
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subjects metrological analysis
multi-beam interferometers
nanomeasuring machine NMM-1
optical and tactile nanoprobes
title The Metrological Basis and Operation of Nanopositioning and Nanomeasuring Machine NMM-1Metrologische Grundlagen und Wirkungsweise der Nanopositionier- und Messmaschine NMM-1
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