Effect of pulsed magnetron sputtering process for the deposition of thin layers of nickel and nickel oxide

Magnetron sputtered nickel and nickel oxide films have been studied for various applications. We may find, among others, these films in electrochromic display devices, in resistive type gas sensors, as metal electrodes in electronic devices, in solar thermal absorbers. Pure nickel films deposited us...

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Veröffentlicht in:	Materials science--Poland 2018-03, Vol.36 (1), p.69-74
Hauptverfasser:	Posadowski, Witold, Wiatrowski, Artur, Kapka, Grzegorz
Format:	Artikel
Sprache:	eng
Schlagworte:	deposition nickel nickel oxide pulsed magnetron sputtering thin film
Online-Zugang:	Volltext
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