Surface Pretreatments for Remove of Native Cu Oxide Layer

In order to remove native Cu oxides formed on Cu seed layer, TS-40A and H2SO4 solutions were used. After various pretreatments, the changed surface of Cu seed layer was estimated by SEM and XPS. For all pretreatments, the mass of samples was decreased. The mass loss of sample treated in H2SO4 soluti...

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Veröffentlicht in:	Journal of Surface Analysis 2011, Vol.17(3), pp.287-291
Hauptverfasser:	Ju, Hyunjin, Lee, Yong-Hyuk, Lee, Youn-Seoung, Rha, Sa-Kyun
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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