Organic Depth Profiling by Cluster Ion Sputter

  Depth profiling of model organic thin films composed of Alq3 and α-NPD on ITO-covered glass has been performed by Ar+ or C60++ ion sputter. In the case of conventional 2keV-Ar+ ion sputter, as a result of the severe damage there are no peaks characteristic of their molecular structure, and a speci...

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Veröffentlicht in:Journal of Surface Analysis 2009, Vol.15(3), pp.239-242
1. Verfasser: Abe, Yoshimi
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
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