Organic Depth Profiling by Cluster Ion Sputter
Depth profiling of model organic thin films composed of Alq3 and α-NPD on ITO-covered glass has been performed by Ar+ or C60++ ion sputter. In the case of conventional 2keV-Ar+ ion sputter, as a result of the severe damage there are no peaks characteristic of their molecular structure, and a speci...
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Veröffentlicht in: | Journal of Surface Analysis 2009, Vol.15(3), pp.239-242 |
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Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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