Simulation of Beam Shape and Energy Distribution for Scanning X-ray Probe

The energy distribution of a scanning X-ray probe for XPS, which is equipped with an elliptical mirror monochromator, has been simulated by employing the optical ray tracing method with numerically described Al Kα X-ray and the rocking curve of α-quartz estimated by dynamical diffraction theory. For...

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Veröffentlicht in:Hyomen Kagaku 1996/07/10, Vol.17(7), pp.406-411
Hauptverfasser: IWAI, Hideo, OIWA, Retsu, KUDO, Masahiro
Format: Artikel
Sprache:eng
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