A Technique for Elimination of Memory Effect by Coating the Adjacent Mechanical Surfaces with Non-Interference Materials

The elimination of memory effect in SIMS (Secondary Ion Mass Spectrometry) has become one of the dominant factors contributing to the reduction of depth profiling accuracy. Most atoms sputtered from the sample by primary ion beam irradiation are deposited on the adjacent mechanical surfaces, especia...

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Veröffentlicht in:	Hyomen Kagaku 1993/09/10, Vol.14(8), pp.500-505
Hauptverfasser:	SUMIYA, Hiroyuki, IKEBE, Yoshinori, TAMURA, Hifumi, SEKI, Setsuko
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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