Measurement of Sputtering Yields of SiO2-Si Samples Sputtered by O2+ and Cs+ Bombardment in SIMS Analysis

Much data on sputtering yields under the bombardment of non-reactive ions such as Ar+, Ne and other ions is avaibable, at present, but not for the sputtering of the samples in secondary ion mass spectrometry (SIMS) analysis. In the analysis, chemically active primary ion species such as O2+, Cs+ and...

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Veröffentlicht in:	Hyomen Kagaku 1992/04/20, Vol.13(3), pp.169-175
Hauptverfasser:	IKEBE, Yoshinori, ISHIKAWA, Katsuhiko, SUMIYA, Hiroyuki, TAMURA, Hifumi
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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