Observation of ALE Growth Process of ZnTe by RHEED

Observation of ALE Growth Process of ZnTe by RHEED

The ALE growth process of ZnTe is investigated with RHEED intensity observation. It is found that when the substrate temperature is sufficiently low, physisorbed Zn and Te adatoms are present on the Zn and Te-coverd surfaces, respectively. The ZnTe layers not less than monolayer grow during one cycl...

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Veröffentlicht in:Hyomen Kagaku 1989/06/20, Vol.10(5), pp.358-363
Hauptverfasser: KAMIYAMA, Satomi, UESUGI, Katsuhiro, FUJIMOTO, Masami, ZHU, Ziqiang, YAO, Takafumi
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container_end_page 363
container_issue 5
container_start_page 358
container_title Hyomen Kagaku
container_volume 10
creator KAMIYAMA, Satomi
UESUGI, Katsuhiro
FUJIMOTO, Masami
ZHU, Ziqiang
YAO, Takafumi
description The ALE growth process of ZnTe is investigated with RHEED intensity observation. It is found that when the substrate temperature is sufficiently low, physisorbed Zn and Te adatoms are present on the Zn and Te-coverd surfaces, respectively. The ZnTe layers not less than monolayer grow during one cycle of ALE by the presence of these excess adatoms. Evaporation of the surface atoms occurs during growth suspension. First, the excess adatoms desorb, and then Zn and Te atomic layers sublime with different sublimation time constants. At high temperatures, the layer-by-layer evaporation occurs, as is verified by RHEED intensity oscillation during the sublimation process.
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It is found that when the substrate temperature is sufficiently low, physisorbed Zn and Te adatoms are present on the Zn and Te-coverd surfaces, respectively. The ZnTe layers not less than monolayer grow during one cycle of ALE by the presence of these excess adatoms. Evaporation of the surface atoms occurs during growth suspension. First, the excess adatoms desorb, and then Zn and Te atomic layers sublime with different sublimation time constants. 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Surf. Sci. Soc. Jpn.</addtitle><date>1989</date><risdate>1989</risdate><volume>10</volume><issue>5</issue><spage>358</spage><epage>363</epage><pages>358-363</pages><issn>0388-5321</issn><eissn>1881-4743</eissn><abstract>The ALE growth process of ZnTe is investigated with RHEED intensity observation. It is found that when the substrate temperature is sufficiently low, physisorbed Zn and Te adatoms are present on the Zn and Te-coverd surfaces, respectively. The ZnTe layers not less than monolayer grow during one cycle of ALE by the presence of these excess adatoms. Evaporation of the surface atoms occurs during growth suspension. First, the excess adatoms desorb, and then Zn and Te atomic layers sublime with different sublimation time constants. At high temperatures, the layer-by-layer evaporation occurs, as is verified by RHEED intensity oscillation during the sublimation process.</abstract><pub>The Surface Science Society of Japan</pub><doi>10.1380/jsssj.10.358</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record>
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