Large-area fabrication of microlens arrays by using self-pinning effects during the thermal reflow process

Generally, the fabrication of curved structures such as microlens arrays has been regarded as an expensive and complicated process. Here, we propose a facile method to form a microlens array with controlled lens curvature by combining residue-free nanoimprint lithography (NIL) with V-shaped molds an...

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Veröffentlicht in:	Optics express 2019-02, Vol.27 (3), p.3439
Hauptverfasser:	Heo, S G, Jang, D, Koo, H-J, Yoon, H
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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