Phase change characteristics of aluminum doped Ge_2Sb_2Te_5 films prepared by magnetron sputtering

Phase change characteristics of aluminum doped Ge_2Sb_2Te_5 films prepared by magnetron sputtering

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Veröffentlicht in:Optics express 2007, Vol.15 (17), p.10584
Hauptverfasser: Wei, Shenjin, Li, Jing, Wu, Xia, Zhou, Peng, Wang, Songyou, Zheng, Yuxiang, Chen, Liangyao, Gan, Fuxi, Zhang, Xia, Li, Guohua
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container_issue 17
container_start_page 10584
container_title Optics express
container_volume 15
creator Wei, Shenjin
Li, Jing
Wu, Xia
Zhou, Peng
Wang, Songyou
Zheng, Yuxiang
Chen, Liangyao
Gan, Fuxi
Zhang, Xia
Li, Guohua
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doi_str_mv 10.1364/OE.15.010584
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title Phase change characteristics of aluminum doped Ge_2Sb_2Te_5 films prepared by magnetron sputtering
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