A New Method for Measuring Flow Velocity Using Periodic Heating and the Sensing Characteristics of a Micro Flow Sensor Manufactured by MEMS Technique

In this paper, a new method for measuring flow velocity has been proposed. It adopts periodic heating as an input signal, and flow velocity is deduced from the phase delay of output signal, coming from adjacent temperature sensors. Since this method doesn't use absolute values of the temperatur...

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Veröffentlicht in:	Nihon Kikai Gakkai rombunshuu. B hen 2006/11/25, Vol.72(723), pp.2596-2603
Hauptverfasser:	KANAOKA, Yoshimitsu, KIMURA, Shigeo, KIWATA, Takahiro, OKAJIMA, Atsushi, KIMURA, Osamu, TANIGAWA, Junya
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Convection Flow Measurements Flowmeter Heat Conduction MEMS Micromachine Periodic Heating Method Quasi-Steady State
Online-Zugang:	Volltext
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