Electric Characteristics of Diamond Film Synthesized by Combustion Flame
The purpose of this research was to clarify the electric characteristics of diamond film synthesized by combustion flame and to synthesize a suitable diamond film for use in electroric device applications. When the film contains amorphous carbon, the dielectric loss increases, i.e., the electric cha...
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| Veröffentlicht in: | Nihon Kikai Gakkai rombunshuu. B hen 2006/04/25, Vol.72(716), pp.1073-1080 |
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| container_title | Nihon Kikai Gakkai rombunshuu. B hen |
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| creator | OKUMURA, Yukihiko KANAYAMA, Kouichi TABARU, Masaya KAWABATA, Satoshi |
| description | The purpose of this research was to clarify the electric characteristics of diamond film synthesized by combustion flame and to synthesize a suitable diamond film for use in electroric device applications. When the film contains amorphous carbon, the dielectric loss increases, i.e., the electric characteristics of the diamond film become worse. To decrease the amorphous carbon in the diamond film we utilized three methods, the detection of the optimal equivalence ratio, the addition of hydrogen into synthesizing gas and heat treatment (annealing) of the diamond film. All of these methods can decrease the amount of amorphous carbon effectively, thus systematically changing the factors influencing the optimal synthesis for improving the film's electric characteristics. We have successfully developed a method for making high-quality diamond film with excellent electric characteristics, which has no dielectric loss in the wide frequency rage (102-108 Hz). |
| doi_str_mv | 10.1299/kikaib.72.1073 |
| format | Article |
| fullrecord | <record><control><sourceid>jstage_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1299_kikaib_72_1073</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>article_kikaib1979_72_716_72_716_1073_article_char_en</sourcerecordid><originalsourceid>FETCH-LOGICAL-c3193-ddf997b4b566b51fe1c787b41935d7e80012aca056688342bf775e259585e0723</originalsourceid><addsrcrecordid>eNp1kE1PAyEQhonRxKb26pk_sCssywJHs7a2sYkH9UyAZS12Pwzgof562bT2YOJpMpn3mZk8ANxilONCiLu92yunc1bkGDFyAWaY8zLjpKwuwQwRzjKKcHUNFiE4jRASpBKEzcB62VkTvTOw3imvTLTehehMgGMLH5zqx6GBK9f18OUwxJ0N7ts2UB9gPfb6KyXHAa461dsbcNWqLtjFqc7B22r5Wq-z7fPjpr7fZoZgQbKmaYVgutS0qjTFrcWG8dSnGW2Y5QjhQhmF0pin7wvdMkZtQQXl1CJWkDnIj3uNH0PwtpWf3vXKHyRGclIhjyokK-SkIgHlH8C4qKbHo1eu-x97OmIfIap3e76ifLLT2VMcCyYmhOHqt0z0OWWSVGkH8gOt_H5D</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Electric Characteristics of Diamond Film Synthesized by Combustion Flame</title><source>J-STAGE (Japan Science & Technology Information Aggregator, Electronic) Freely Available Titles - Japanese</source><source>EZB-FREE-00999 freely available EZB journals</source><creator>OKUMURA, Yukihiko ; KANAYAMA, Kouichi ; TABARU, Masaya ; KAWABATA, Satoshi</creator><creatorcontrib>OKUMURA, Yukihiko ; KANAYAMA, Kouichi ; TABARU, Masaya ; KAWABATA, Satoshi</creatorcontrib><description>The purpose of this research was to clarify the electric characteristics of diamond film synthesized by combustion flame and to synthesize a suitable diamond film for use in electroric device applications. When the film contains amorphous carbon, the dielectric loss increases, i.e., the electric characteristics of the diamond film become worse. To decrease the amorphous carbon in the diamond film we utilized three methods, the detection of the optimal equivalence ratio, the addition of hydrogen into synthesizing gas and heat treatment (annealing) of the diamond film. All of these methods can decrease the amount of amorphous carbon effectively, thus systematically changing the factors influencing the optimal synthesis for improving the film's electric characteristics. We have successfully developed a method for making high-quality diamond film with excellent electric characteristics, which has no dielectric loss in the wide frequency rage (102-108 Hz).</description><identifier>ISSN: 0387-5016</identifier><identifier>EISSN: 1884-8346</identifier><identifier>DOI: 10.1299/kikaib.72.1073</identifier><language>eng ; jpn</language><publisher>The Japan Society of Mechanical Engineers</publisher><subject>Amorphous Carbon ; Combustion ; Diamond Film ; Dielectric Characteristics ; Electric Characteristics ; Synthesis</subject><ispartof>Transactions of the Japan Society of Mechanical Engineers Series B, 2006/04/25, Vol.72(716), pp.1073-1080</ispartof><rights>The Japan Society of Mechanical Engineers</rights><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3193-ddf997b4b566b51fe1c787b41935d7e80012aca056688342bf775e259585e0723</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,1877,4010,27900,27901,27902</link.rule.ids></links><search><creatorcontrib>OKUMURA, Yukihiko</creatorcontrib><creatorcontrib>KANAYAMA, Kouichi</creatorcontrib><creatorcontrib>TABARU, Masaya</creatorcontrib><creatorcontrib>KAWABATA, Satoshi</creatorcontrib><title>Electric Characteristics of Diamond Film Synthesized by Combustion Flame</title><title>Nihon Kikai Gakkai rombunshuu. B hen</title><addtitle>JSMET</addtitle><description>The purpose of this research was to clarify the electric characteristics of diamond film synthesized by combustion flame and to synthesize a suitable diamond film for use in electroric device applications. When the film contains amorphous carbon, the dielectric loss increases, i.e., the electric characteristics of the diamond film become worse. To decrease the amorphous carbon in the diamond film we utilized three methods, the detection of the optimal equivalence ratio, the addition of hydrogen into synthesizing gas and heat treatment (annealing) of the diamond film. All of these methods can decrease the amount of amorphous carbon effectively, thus systematically changing the factors influencing the optimal synthesis for improving the film's electric characteristics. We have successfully developed a method for making high-quality diamond film with excellent electric characteristics, which has no dielectric loss in the wide frequency rage (102-108 Hz).</description><subject>Amorphous Carbon</subject><subject>Combustion</subject><subject>Diamond Film</subject><subject>Dielectric Characteristics</subject><subject>Electric Characteristics</subject><subject>Synthesis</subject><issn>0387-5016</issn><issn>1884-8346</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp1kE1PAyEQhonRxKb26pk_sCssywJHs7a2sYkH9UyAZS12Pwzgof562bT2YOJpMpn3mZk8ANxilONCiLu92yunc1bkGDFyAWaY8zLjpKwuwQwRzjKKcHUNFiE4jRASpBKEzcB62VkTvTOw3imvTLTehehMgGMLH5zqx6GBK9f18OUwxJ0N7ts2UB9gPfb6KyXHAa461dsbcNWqLtjFqc7B22r5Wq-z7fPjpr7fZoZgQbKmaYVgutS0qjTFrcWG8dSnGW2Y5QjhQhmF0pin7wvdMkZtQQXl1CJWkDnIj3uNH0PwtpWf3vXKHyRGclIhjyokK-SkIgHlH8C4qKbHo1eu-x97OmIfIap3e76ifLLT2VMcCyYmhOHqt0z0OWWSVGkH8gOt_H5D</recordid><startdate>2006</startdate><enddate>2006</enddate><creator>OKUMURA, Yukihiko</creator><creator>KANAYAMA, Kouichi</creator><creator>TABARU, Masaya</creator><creator>KAWABATA, Satoshi</creator><general>The Japan Society of Mechanical Engineers</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>2006</creationdate><title>Electric Characteristics of Diamond Film Synthesized by Combustion Flame</title><author>OKUMURA, Yukihiko ; KANAYAMA, Kouichi ; TABARU, Masaya ; KAWABATA, Satoshi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3193-ddf997b4b566b51fe1c787b41935d7e80012aca056688342bf775e259585e0723</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng ; jpn</language><creationdate>2006</creationdate><topic>Amorphous Carbon</topic><topic>Combustion</topic><topic>Diamond Film</topic><topic>Dielectric Characteristics</topic><topic>Electric Characteristics</topic><topic>Synthesis</topic><toplevel>online_resources</toplevel><creatorcontrib>OKUMURA, Yukihiko</creatorcontrib><creatorcontrib>KANAYAMA, Kouichi</creatorcontrib><creatorcontrib>TABARU, Masaya</creatorcontrib><creatorcontrib>KAWABATA, Satoshi</creatorcontrib><collection>CrossRef</collection><jtitle>Nihon Kikai Gakkai rombunshuu. B hen</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>OKUMURA, Yukihiko</au><au>KANAYAMA, Kouichi</au><au>TABARU, Masaya</au><au>KAWABATA, Satoshi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electric Characteristics of Diamond Film Synthesized by Combustion Flame</atitle><jtitle>Nihon Kikai Gakkai rombunshuu. B hen</jtitle><addtitle>JSMET</addtitle><date>2006</date><risdate>2006</risdate><volume>72</volume><issue>716</issue><spage>1073</spage><epage>1080</epage><pages>1073-1080</pages><artnum>1073</artnum><issn>0387-5016</issn><eissn>1884-8346</eissn><abstract>The purpose of this research was to clarify the electric characteristics of diamond film synthesized by combustion flame and to synthesize a suitable diamond film for use in electroric device applications. When the film contains amorphous carbon, the dielectric loss increases, i.e., the electric characteristics of the diamond film become worse. To decrease the amorphous carbon in the diamond film we utilized three methods, the detection of the optimal equivalence ratio, the addition of hydrogen into synthesizing gas and heat treatment (annealing) of the diamond film. All of these methods can decrease the amount of amorphous carbon effectively, thus systematically changing the factors influencing the optimal synthesis for improving the film's electric characteristics. We have successfully developed a method for making high-quality diamond film with excellent electric characteristics, which has no dielectric loss in the wide frequency rage (102-108 Hz).</abstract><pub>The Japan Society of Mechanical Engineers</pub><doi>10.1299/kikaib.72.1073</doi><tpages>8</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0387-5016 |
| ispartof | Transactions of the Japan Society of Mechanical Engineers Series B, 2006/04/25, Vol.72(716), pp.1073-1080 |
| issn | 0387-5016 1884-8346 |
| language | eng ; jpn |
| recordid | cdi_crossref_primary_10_1299_kikaib_72_1073 |
| source | J-STAGE (Japan Science & Technology Information Aggregator, Electronic) Freely Available Titles - Japanese; EZB-FREE-00999 freely available EZB journals |
| subjects | Amorphous Carbon Combustion Diamond Film Dielectric Characteristics Electric Characteristics Synthesis |
| title | Electric Characteristics of Diamond Film Synthesized by Combustion Flame |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-08T09%3A01%3A19IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-jstage_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Electric%20Characteristics%20of%20Diamond%20Film%20Synthesized%20by%20Combustion%20Flame&rft.jtitle=Nihon%20Kikai%20Gakkai%20rombunshuu.%20B%20hen&rft.au=OKUMURA,%20Yukihiko&rft.date=2006&rft.volume=72&rft.issue=716&rft.spage=1073&rft.epage=1080&rft.pages=1073-1080&rft.artnum=1073&rft.issn=0387-5016&rft.eissn=1884-8346&rft_id=info:doi/10.1299/kikaib.72.1073&rft_dat=%3Cjstage_cross%3Earticle_kikaib1979_72_716_72_716_1073_article_char_en%3C/jstage_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |