Fundamental Investigation of a Piezoelectric Pump for a Trace Liquid Feed

Generally, peristaltic and syringe pumps have been used to feed liquids at about 2(ml/min). However, since continuous and low-fluctuation flow cannot be easily realized simultaneously with either of these two types of pumps, a new type of microquantity pump is required in the field of pharmaceutical manufacturing. Therefore piezoelectric elements were applied to fabricate a 2-dimensional pump suitable for multichannel and multistage pumps. Experiments demonstrated that the pump worked successfully and its maximum head was 18(kPa).